Karl Suss/Microtec MA 6 Mask Aligner, 4’’- 6’’ (2001 Vintage)

Description

The National Research Council Canada has a requirement for the supply of one(1) 1 - KARL SUSS / MICROTEC MA 6 Mask aligner, 4"-6". Top Side Alignment (TSA) and Back Side Alignment (BSA)2001 vintage. The CPFC photonics manufacturing Process uses photolithography tool to support the manufacture of photonic components for our research and external customers. In our lithography work center, we are in need of a system that will allow us to do back Side alignment on our substrates. This Karl/SUSS Microtec MA6 will provide this capability. The MA 6 possesses bottom side alignment capabilities, a required capability for substrates with patterns printed on both sides. The MA 6 is equipped with a bottom side alignment system and the AL 300 Alignment system, consisting of two (2) independent video microscopes positioned below the substrate.