LA3363C-Request-for-Tenders under Open (National) Procedure for the Supply, Delivery, Installation and Commissioning of a Maskless Photolithography System for Dublin City University (DCU)

Description

Tenders are sought for the Supply, Delivery, Installation and Commissioning of a maskless photolithography system to Dublin City University (DCU) which can create micron-scale (i.e. 1um or less) structures on SU8 coated silicon wafers by directly writing a design onto the wafer. The wafer size should be minimum standard 4" dimensions. Ideally, the instrument will be designed to operate outside a clean-room environment.