XYZ Phi stage for wafers up to 12 inches (IMS-06.1) & 6-Axis Hexapods + Controllers (IMS-06.2) - PR1046956-2380-P

Description

IMS needs a semi-automatic test setup for fast characterization of photonic integrated circuits (PIC) and devices on a wafer scale. The setup consists of a six degree of freedom (6D) nanopositioning system and of a rotation stage. A six degrees of freedom (6D) nanopositioning system in photonics is used to precisely position optical fibers and fiber arrays, facilitating accurate optical coupling with photonic integrated circuits and devices. The precise control of six degrees of freedom (three Cartesian and three angular coordinates) ensures optimal alignment and efficient probing of photonic structures on wafers and dies. Two pieces of 6D nanopositioners are needed - one for the input and one for the output of the PIC. A rotation stage with positioning control able to carry wafers with a diameter of 300 mm is needed to enable experimental characterization of photonic integrated circuits (PIC) and devices on a wafer scale. The stage needs a precise positioning along four axes (xyz and θz) to enable efficient alignment of PIC and devices to optical and electrical probes.