Reactive Ion Etching (RIE) System
Walther-Meissner-Institut der Bayerischen Akademie der Wissenschaften
The Walther-Meißner-Institut (WMI) will acquire a Reactive Ion Etching (RIE) System for the fabrication of superconducting quantum circuits. This requires the ability to run a variety and combination of etching processes and process monitoring capabilities to enable the reprod...