Process Monitoring Tool

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.Germany

Purchaser

Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V.

Country

Germany

Published

20 Feb 2026

Closing date

Not listed

Source ID

Docs found

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Tender summary

Upgrade of the existing process monitoring system mesc21-11 (Nanofocus topography measurement system serial number 700259) located at Fraunhofer IPMS CNT An der Bartlake 5. Upgrade cosists of an automatic handling system for wafers in a seperately enclosed environment. The system is capable of handling wafers from a SEMI 300 mm FOUP to the existing measurement tool. The system is also able to introduce 200 mm Wafers into a suitable adapter enabling processing on standard 300 mm tools and handle the 200 mm wafers in adapter into a SEMI standard 300 mm FOUP.

What to check before bidding

Issued by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e. V..
Located in Germany.
No closing date is listed yet.
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